XY方向:噪声水平<1ÅRMS; Z方向: 噪音水平 < 0.1ÅRMS
扫描范围:90?m x 90 ?m
温度控制范围:-30~250℃
湿度控制范围:2%-98%RH
工作模式:Scanning Tuning Microscopy,Atomic Force Microscopy,Magnetic Force Microscopy,Conductive AFM,Lateral Force Microscopy,Electric Force Microscopy,Piezo-Response Force Microscopy 等
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